MICRO-PIXE ANALYZING METHOD AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a micro-PIXE(particle induced X-ray emission) analyzing method capable of finding three-dimensional composition distribution of a sample. SOLUTION: In this analyzing method, an ion beam B1 generated by an accelerator 3 is applied through a degrader 4 with the function of regulating the decelerating amount of the beam to an energy analyzing electromagnet 5, and an ion beam B2 emitted out of the electromagnet 5 is made a microbeam to irradiated a sample 13. The energy of the ion beam applied to the electromagnet 5 is changed by the degrader 4 to change the depth of entry of the microbeam MB into the sample 13 for providing two-dimensional scanning for the microbeam with a scanner 11. The change of the depth of the entry of the microbeam and the two-dimensional scanning are combined to detect characteristic X-ray while changing the arrival position of the microbeam on a three-dimensional basis to find three-dimensional composition distribution of the sample 13.