| 发明名称 |
WAFERHALTEPLATTE UND HEBEVORRICHTUNG |
| 摘要 |
An apparatus for releasably holding a workpiece in semiconductor process systems such as a batch ion implanter which comprises a linkage mechanism mounted onto the backside of the platen for clamping the wafer against the fence of the supporting means and pusher means mounted on wafer lift means for engagement with the lever mechanism for locking and unlocking the device, and sensing any misclamp of the workpiece. |
| 申请公布号 |
DE69422700(D1) |
申请公布日期 |
2000.02.24 |
| 申请号 |
DE1994622700 |
申请日期 |
1994.06.13 |
| 申请人 |
VARIAN ASSOCIATES, INC. |
发明人 |
FREYTSIS, AVRUM;HERTEL, J. |
| 分类号 |
H01L21/683;H01L21/265;H01L21/687;(IPC1-7):B05C13/00;B05C11/02;H01L21/00 |
主分类号 |
H01L21/683 |
| 代理机构 |
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代理人 |
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