MICRO GYROSCOPE FOR REDUCING SIZE OF MICRO GYROSCOPE WITH SIMPLE STRUCTURE

摘要

PURPOSE: A micro gyroscope is provided to reduce a size of the micro gyroscope with a simple structure by integrally forming a driving motion detection electrode with a Coriolis motion detection electrode. CONSTITUTION: A micro gyroscope(100) includes a driving gimbal(112) having a rectangular shape. The driving gimbal(112) forms a vibration mass installed on a housing or a substrate(111). A driving electrode is installed at upper and lower outer portions of the driving electrode. The driving electrode(116) is fixed to the substrate(111). A detection gimbal(118) is installed in the driving gimbal(112). First and second Coriolis motion detection electrodes(122a,122b) are fixedly installed in the detection gimbal(118).