| 摘要 |
PROBLEM TO BE SOLVED: To provide a scattering analyzer which is excellent in efficiency and hardly generates X-ray by suppressing impurity ion beams in a gas ion source mounted in a high-voltage terminal casing of the high-energy ion beam scattering analyzer. SOLUTION: In the gas ion source equipped with a vacuum container for introducing a raw material gas such as helium, a means 5 for generating a magnetic field in its axis direction, cathode electrodes 4a, 4b and an anode electrode 3, the raw material gas introduced in the vacuum container is ionized by applying voltage between the anode electrode and the cathode electrodes, and generated electrons 7 collide with the unionized raw material gas and ionize it. Gas ions are drawn out from a drawing opening hole 8 as the gas ion source. Titanium metal is used as a component material of the cathode electrodes. Since clean surfaces of the titanium metal which adsorb impurity gas are formed on the anode electrode 3 and the titanium electrode 12b due to titanium atoms 14 emitted from the titanium electrode 12b with the collision of the gas ions, a high-purity ion beam can be obtained. COPYRIGHT: (C)2005,JPO&NCIPI
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