发明名称 |
Method of providing a hydrophobic layer and a condenser microphone having such a layer |
摘要 |
A method of providing at least part of a diaphragm and at least a part of a back-plate of a condenser microphone with a hydrophobic layer so as to avoid stiction between said diaphragm and said back-plate. The layer is deposited via a number small of openings in the back-plate, the diaphragm and/or between the diaphragm and the back-plate. Provides a homogeneous and structured hydrophobic layer, even to small internal cavities of the microstructure. The layer may be deposited by a liquid phase or a vapor phase deposition method. The method may be applied naturally in continuation of the normal manufacturing process.Further, a MEMS condenser microphone is provided having such a hydrophobic layer. The static distance between the diaphragm and the back-plate of the microphone is smaller than 10 mum.
|
申请公布号 |
US6859542(B2) |
申请公布日期 |
2005.02.22 |
申请号 |
US20010867606 |
申请日期 |
2001.05.31 |
申请人 |
SONION LYNGBY A/S |
发明人 |
JOHANNSEN IB;LARSEN NIELS BENT;MULLENBORN MATTHIAS;ROMBACH PIRMIN HERMANN OTTO |
分类号 |
H04R1/00;H04R19/04;(IPC1-7):H04R25/00 |
主分类号 |
H04R1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|