ELECTROSTATIC ACTUATOR, LIQUID DROP EJECTION HEAD, MANUFACTURING METHOD THEREOF, AND LIQUID DROP EJECTOR

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic actuator excelling in driving durability and capable of high voltage driving while preventing sticking of a vibrating plate and preventing an insulating film or a DLC (diamond-like carbon) film on the abutting surface side from turning into foreign matter, and to provide a liquid drop ejection head, a manufacturing method thereof, and a liquid drop ejector. SOLUTION: The electrostatic actuator includes individual electrodes 5 formed on a substrate; the vibrating plate 6 arranged facing the individual electrodes 5 through a predetermined gap; and a driving control circuit 40 generating electrostatic force between the individual electrodes 5 and the vibrating plate 6 to cause displacement of the vibrating plate 6. An oxide-based insulating film is formed on the vibrating plate 6 or on the individual electrodes 5, and a plurality of hydrogenated amorphous carbon films different in volume resistivity are further formed on the oxide-based insulating film. COPYRIGHT: (C)2010,JPO&INPIT