| 发明名称 |
METHOD AND APPARATUS FOR INSPECTION AND METROLOGY |
| 摘要 |
A method of position control of an optical component relative to a surface is disclosed. The method may include: obtaining a first signal by a first position measurement process; controlling relative movement between the optical component and the surface for a first range of motion using the first signal; obtaining a second signal by a second position measurement process different than the first position measurement process; and controlling relative movement between the optical component and the surface for a second range of motion using the second signal, the second range of motion being nearer the surface than the first range of motion. |
| 申请公布号 |
US2016266503(A1) |
申请公布日期 |
2016.09.15 |
| 申请号 |
US201615065674 |
申请日期 |
2016.03.09 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
Van Voorst Peter Danny;Akbulut Duygu;Van Berkel Koos;Van De Wijdeven Jeroen Johan Maarten;Zijp Ferry |
| 分类号 |
G03F7/20;G01B11/00;G02B27/09 |
主分类号 |
G03F7/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of position control of an optical component relative to a surface, the method comprising:
obtaining a first signal by a first position measurement process; controlling relative movement between the optical component and the surface for a first range of motion using the first signal; obtaining a second signal by a second position measurement process different than the first position measurement process; and controlling relative movement between the optical component and the surface for a second range of motion using the second signal, the second range of motion being nearer the surface than the first range of motion. |
| 地址 |
Veldhoven NL |
