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发明名称
Verbesserte Photoharze fuer die Halbleiterfertigung
摘要
申请公布号
DE1915084(A1)
申请公布日期
1970.04.02
申请号
DE19691915084
申请日期
1969.03.25
申请人
INTERNATIONAL BUSINESS MACHINES CORP.
发明人
HENRY COLLINS,ROBERT;THOMAS DEVERSE,FRANK
分类号
C08L7/00;C08K5/04;C08L21/00;G03F7/008;G03F7/038;H01L21/027;H01L23/29
主分类号
C08L7/00
代理机构
代理人
主权项
地址
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