发明名称 Control of metal etching
摘要 Metal masked photographically for etching tends to be undercut round the edges of the mask, depending upon the length of the etching period. Commonly the mask is made too large by an amount equal to the expected undercut, so that the finished pattern will be correct to size. The new method follows the outline of the mask with a conductor of the same metal as the workpiece, having a horizontal thickness equal to the difference between the desired width of pattern and the expected undercut width. Sudden increase in the resistance of the conductor means that metal of that thickness has been etched away, i.e., the expected amount of undercut has taken place.
申请公布号 DE1946087(A1) 申请公布日期 1970.04.02
申请号 DE19691946087 申请日期 1969.09.11
申请人 HITACHI LTD. 发明人 SASAKI,TOSHIO;MOTOZIMA,HIROSHI;SASAKI,EIICHI
分类号 C23F1/02;H05K1/02;H05K3/06 主分类号 C23F1/02
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