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发明名称
Verfahren zum gleichzeitigen Herstellen einer Vielzahl von Halbleiter-Bauelementen
摘要
申请公布号
DE1564720(A1)
申请公布日期
1970.09.17
申请号
DE1966S106032
申请日期
1966.09.22
申请人
SIEMENS AG
发明人
LUOZZ,GERHARD
分类号
H01L21/00;H01L21/48;H01L21/52;H01L21/60;H01L23/051;H01L23/31
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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