| 摘要 |
PURPOSE:To achieve the miniaturization of the title apparatus, by a method wherein one of an X-table and a Y-table is arranged inside the other table and a theta-table is further arranged inside the inside table and the respective upper surfaces of all of the tables are arranged on the same plane. CONSTITUTION:Two Y-axis guides 3 are provided to the support stands 2 pro vided to the edge parts of the upper surface of a table base 1 in a protruding state and Y-table 5 is displaced in a Y-direction by a Y-axis drive motor 4 through a Y-axis friction driver bar 6. The X-table 7 provided within the frame of the table 5 is displaced in an X-direction along an X-axis guide 8 by an X-axis drive motor 10 through an X-axis friction drive bar 9. Further, the theta-table 11 provided within the frame of the table 7 is revolved and displaced along a theta-table guide 13 by a theta-axis drive motor 12. The respective tables 5, 7, 11 are arranged on the same plane to be received within the thickness of one table. |
