发明名称 MANUFACTURE OF CHALCOPYRITE TYPE COMPOUND
摘要 PURPOSE:To provide a method for manufacturing a chalcopyrite type compound thin film that has a microscopically uniform composition and is expressed by I-III-VI (where I represents group Ib elements; III, group IIIb elements; and VI, group VIb elements). CONSTITUTION:A metal electrode 2 of group Ib elements placed on a substrate 1 and an oxide 3 consisting of group IIIb elements are subjected to treatment in a reducing atmosphere that contains group VIb elements, whereby a chalcopyrite type compound 4 is manufactured.
申请公布号 JPH05326997(A) 申请公布日期 1993.12.10
申请号 JP19920125849 申请日期 1992.05.19
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 WADA TAKAHIRO;NISHITANI MIKIHIKO;NEGAMI TAKAYUKI
分类号 H01L31/04;H01L21/363;H01L31/10 主分类号 H01L31/04
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