发明名称 |
MANUFACTURE OF CHALCOPYRITE TYPE COMPOUND |
摘要 |
PURPOSE:To provide a method for manufacturing a chalcopyrite type compound thin film that has a microscopically uniform composition and is expressed by I-III-VI (where I represents group Ib elements; III, group IIIb elements; and VI, group VIb elements). CONSTITUTION:A metal electrode 2 of group Ib elements placed on a substrate 1 and an oxide 3 consisting of group IIIb elements are subjected to treatment in a reducing atmosphere that contains group VIb elements, whereby a chalcopyrite type compound 4 is manufactured. |
申请公布号 |
JPH05326997(A) |
申请公布日期 |
1993.12.10 |
申请号 |
JP19920125849 |
申请日期 |
1992.05.19 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
WADA TAKAHIRO;NISHITANI MIKIHIKO;NEGAMI TAKAYUKI |
分类号 |
H01L31/04;H01L21/363;H01L31/10 |
主分类号 |
H01L31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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