| 摘要 |
PURPOSE:To improve efficiency of removing impurities by a chemical filter in an air conditioning system suitable for a clean room which is incorporated with the chemical filter. CONSTITUTION:Air sent by an air conditioner 11 is fed to a clean room 13 through a high quality filter 12 and returned to the air conditioner 11 from an raised floor 14 surface. Just below the upraised floor 14 in an area in which impurities are generated, a chemical filter 18 is placed so that the chemical filter 18 can absorb the impurities. |
