| 摘要 |
PURPOSE:To measure an object to be inspected in motion, by arranging one or more of spectral elements on an X-ray optical axis and making an incident angle independently variable. CONSTITUTION:X-rays emitted from an X-ray source 1 are allowed to be incident to an object 2 to be inspected and the transmitted X-rays are allowed to be incident to the first spectroscope 3 to selectively reflect only a component having the wavelength lambda1 corresponding to an incident angle theta1 and said component is measured by a two-dimensional X-ray detector 4. When the spectroscope 3 is sufficiently thin, a component having a wavelength different from the wavelength lambda1 transmits through the spectroscope 3 to be incident to the second spectroscope 5 and only a component having the wavelength lambda2 corresponding to an incident angle theta2 is reflected to be measured by a two-dimensional X-ray detector 6. As mentioned above, by arranging the spectroscopes 3, 5 at different incident angles, transmitted images due to monochromatic X-rays of two kinds of energies can be simultaneously measured. By this method, an object to be inspected in motion can be measured. |
