MANUFACTURE OF SINGLE CRYSTAL THIN-FILM,申请号JP19870154462-传众专利搜索

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发明名称	MANUFACTURE OF SINGLE CRYSTAL THIN-FILM
摘要
申请公布号	JPS64721(A)	申请公布日期	1989.01.05
申请号	JP19870154462	申请日期	1987.06.23
申请人	AGENCY OF IND SCIENCE & TECHNOL	发明人	MIYAJIMA TOSHIAKI;KOBA MASAYOSHI
分类号	H01L21/20;H01L21/263	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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