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发明名称
VACUUM VAPOR DEPOSITION APPARATUS
摘要
申请公布号
JPH01306554(A)
申请公布日期
1989.12.11
申请号
JP19880136912
申请日期
1988.06.02
申请人
NEC YAMAGATA LTD
发明人
HANDA KIYOSHI
分类号
C23C14/24;C23C14/54;H01L21/285
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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