摘要 |
PURPOSE:To improve strength and heat resistance by compacting the mixed powder of AlN, BN and a sintering assistant into a specified shape and then sintering the green compact. CONSTITUTION:AlN powder, BN and a sintering assistant are mixed in a specified ratio, and the mixture is compacted into a specified shape. The green compact for the vessel main body 1 and a lid 2 is sintered, then the formed B2O3 is cleaned off with methanol, and a vessel of the AlN.BN composite sintered body contg. 20-90wt.% AlN, <=1wt.% B2O3 impurity and the balance BN and excellent in strength and heat resistance is obtained. A high-purity BN thin sheet 6 is laid in the vessel, a green compact 7 contg. the AlN and sintering assistant in the same ratio as in the vessel is arranged on the thin sheet 6 and sintered under the same conditions, and a high-purity AlN sintered body is obtained. |