发明名称 |
APPARATUS FOR MEASURING CARRIER LIFETIME OF SEMICONDUCTOR PHOTOEMITTER |
摘要 |
PURPOSE:To provide an apparatus for measuring carrier lifetime simply and in a short time without being influenced by floating capacitance regardless of the packaging form of a semiconductor photoemitter under test. CONSTITUTION:A pump laser 11 is modulated by the electric signal of a network analyzer 12, where an optical output of the pump laser 11 is injected into a semiconductor photoemitter 10 under test and converted into an electric signal by a photoreceptor 13 through the optical modulation of the photoemitter 10, thereby being inputted into the network analyzer. |
申请公布号 |
JPH04275447(A) |
申请公布日期 |
1992.10.01 |
申请号 |
JP19910037002 |
申请日期 |
1991.03.04 |
申请人 |
NEC CORP |
发明人 |
SHIMIZU JUNICHI;MURATA SHIGERU |
分类号 |
H01L21/66;H01L33/06;H01L33/58;H01L33/60;H01S3/00;H01S3/06 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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