发明名称 APPARATUS FOR MEASURING CARRIER LIFETIME OF SEMICONDUCTOR PHOTOEMITTER
摘要 PURPOSE:To provide an apparatus for measuring carrier lifetime simply and in a short time without being influenced by floating capacitance regardless of the packaging form of a semiconductor photoemitter under test. CONSTITUTION:A pump laser 11 is modulated by the electric signal of a network analyzer 12, where an optical output of the pump laser 11 is injected into a semiconductor photoemitter 10 under test and converted into an electric signal by a photoreceptor 13 through the optical modulation of the photoemitter 10, thereby being inputted into the network analyzer.
申请公布号 JPH04275447(A) 申请公布日期 1992.10.01
申请号 JP19910037002 申请日期 1991.03.04
申请人 NEC CORP 发明人 SHIMIZU JUNICHI;MURATA SHIGERU
分类号 H01L21/66;H01L33/06;H01L33/58;H01L33/60;H01S3/00;H01S3/06 主分类号 H01L21/66
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