BAND LIGHT OF CHROMATIC ABERRATION DOUBLE FOCUS DEVICE AND DOUBLE COLOR LIGHT ILLUMINATING METHOD

摘要

PURPOSE:To increase an imaging contrast and to improve a resolving power by forming the alignment light of the chromatic aberration double focus detector by selecting the light of a wavelength having a high spectral transmittance. CONSTITUTION:An X-ray mask 9 which is a 1st object is illuminated by sorting monochromatic light of >=500nm wavelength to an X-ray mask 9 and specified band light or double color light of the wavelength longer than the wavelength of the monochromatic light to a wafer 10 which is a 2nd object.