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发明名称
SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号
JPH0684781(A)
申请公布日期
1994.03.25
申请号
JP19920235813
申请日期
1992.09.03
申请人
FUJITSU LTD
发明人
SHIMOYAMA TORU
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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