| 摘要 |
A magnetically enhanced plasma source is provided to more uniformly maintain plasma of high density by forming toroidal plasma in a plasma reaction chamber. A plasma source includes a plasma reaction chamber(10) having a susceptor(17) loaded with a substrate, and a ferrite core assembly(20) disposed on an outer ceiling of the plasma reaction chamber for forming toroidal plasma in the plasma reaction chamber. The ferrite core assembly has at least two annular ferrite cores(21,22) concentrically disposed, plural bar-type ferrite cores(23) each wound with an induction coil(24), and a first power supply source(30) supplying an AC power to induce plasma on the induction coil.
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