| 摘要 |
PURPOSE:To provide the manufacturing method of ceramic multilayer substrate capable of reducing the dimensional dispersion in XY-direction caused in the hot press baking step without fail. CONSTITUTION:A laminated body is made of plural aluminum nitride made green sheet to be pre-calcined later. Next, bar bodies 6 are closely arranged on the periphery 5a of the produced pre-calcined bodies 5. The bar bodies 6 made of aluminum nitride have almost the same thickness as that of the pre- calcined bodies 5. Next, the pre-baked bodies 5, the bar bodies 6 and spacers 7 are alternately laminated to be contained later in a jig 8 of a hot press device. At this time, the clearance between the outer side 6a of the bar bodies 6 and the inner sidewall 8a is set up not to exceed 0.1mm so that they may roughly abut against each other. Finally, the laminated body is to be finally fired following the ordinary procedures. |
