| 摘要 |
PURPOSE:To obtain a stabilized or partially stabilized zirconia thin film useful as a solid electrolyte for oxygen sensors or the third-generation fuel cells by film formation, through electron beam heating technique, of a depositing material comprising zirconia and an alkaline earth metal or rare earth metal oxide. CONSTITUTION:A depositing material comprising alkaline earth metal(e.g. Ca, Mg) and/or rare earth metal (e.g. Y) oxide and zirconia, with the former dissolved in the latter into a solid solution or both the former and latter separated from each other, is placed in a crucible followed by film formation at a rate of <=50 Angstrom /see on a substrate (e.g. made of alumina)in a vacuum of <=5X10<-4> Torr using an electron beam heating-type vacuum deposition device. The thickness of the resultant film is set at 30 20mum for making the resultant film porous). With the present method, the objective zirconia thin film <20% in the X-ray diffraction intensity for each of the rest crystal planes based on that for (111) plane and <=0.8 deg. in the half-width of the diffraction peak for the (111) plane can be obtained. |
