| 摘要 |
A method for suppressing an electromagnetic wave in a semiconductor manufacturing process contemplates diffusion of a material into a region where active elements for processing a high speed digital signal are massed. During a wafer manufacturing process, high temperature particles of the material is diffused to shield the active elements of the integrated circuit from electromagnetic waves, and the integrated circuit is packaged in a circuit interlocking a wafer chip and external electrical conducting pins emanating from the integrated circuit are wrapped with a material exhibiting a resistance varying directly with the frequency of a high frequency components of electromagnetic interference. Since a main portion is surrounded by a material for shielding an electromagnetic wave in a wafer manufacturing process and a package manufacturing process for the manufactured wafer chip, electromagnetic shielding is obtained relative to other circuits on the chip. As a result, a high frequency component can be prevented from being externally radiated. |
