OPTICAL LITHOGRAPHIC DEVICE HAVING A MACHINE FRAME WITH FORCE COMPENSATION,申请号KR19920003523-传众专利搜索

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发明名称	OPTICAL LITHOGRAPHIC DEVICE HAVING A MACHINE FRAME WITH FORCE COMPENSATION
摘要
申请公布号	KR100249379(B1)	申请公布日期	2000.06.01
申请号	KR19920003523	申请日期	1992.03.04
申请人	KONINKLIJKE PHILIPS ELECTRONICS N.V.	发明人	JAN, VAN EIJK;GERARD, VAN ENGELEN;HENDRIKUD, HERMAN MARIE COX;HENRICUS, ERNEST BEEKAMAN;FRANSISCUS, MATHIJS JACOBS
分类号	F16F15/03;F16H21/10;G03F7/20;G03F9/00;H01L21/027;H01L21/30;H02P25/06;(IPC1-7):G03F7/20	主分类号	F16F15/03
代理机构		代理人
主权项
地址

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