发明名称 QUARTZ GLASS CRUCIBLE HAVING MULTILAYER STRUCTURE AND METHOD OF PRODUCING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To provide a quartz glass crucible having a multilayer structure and useful for pulling a silicon single crystal, with which heat convection in a silicon melt can be suppressed and the occurrence of the vibration at the surface of the melt can be suppressed and which has at least a three layer structure composed of a semi-transparent outer layer made of natural quartz glass and containing a plurality of bubbles, a transparent inner layer made of synthetic quartz glass and substantially free from bubbles and a semi-transparent intermediate layer made of synthetic quartz glass, containing a plurality of bubbles and being provided between the outer layer and the inner layer, and to provide a method of producing the same. SOLUTION: The quartz glass crucible has the multilayer structure comprising at least three layers of the semi-transparent outer layer made of the natural quartz glass, the semi-transparent intermediate layer made of the synthetic quartz glass and the transparent inner layer made of the synthetic quartz glass.</p>
申请公布号 JP2001348294(A) 申请公布日期 2001.12.18
申请号 JP20000163645 申请日期 2000.05.31
申请人 SHINETSU QUARTZ PROD CO LTD 发明人 OHAMA YASUO;MATSUI HIROSHI
分类号 C03B20/00;C03B19/09;C30B15/10;C30B35/00;(IPC1-7):C30B15/10 主分类号 C03B20/00
代理机构 代理人
主权项
地址