摘要 |
<p>PROBLEM TO BE SOLVED: To provide a quartz glass crucible having a multilayer structure and useful for pulling a silicon single crystal, with which heat convection in a silicon melt can be suppressed and the occurrence of the vibration at the surface of the melt can be suppressed and which has at least a three layer structure composed of a semi-transparent outer layer made of natural quartz glass and containing a plurality of bubbles, a transparent inner layer made of synthetic quartz glass and substantially free from bubbles and a semi-transparent intermediate layer made of synthetic quartz glass, containing a plurality of bubbles and being provided between the outer layer and the inner layer, and to provide a method of producing the same. SOLUTION: The quartz glass crucible has the multilayer structure comprising at least three layers of the semi-transparent outer layer made of the natural quartz glass, the semi-transparent intermediate layer made of the synthetic quartz glass and the transparent inner layer made of the synthetic quartz glass.</p> |