发明名称 JIG FOR SETTING BONDING ARM PERPENDICULAR AND METHOD FOR SETTING BONDING ARM PERPENDICULAR
摘要 PROBLEM TO BE SOLVED: To set a bonding arm perpendicular without requiring a high skill. SOLUTION: A block 20 for perpendicular setting is set perpendicular to the bottom surface of a block main body 21, and is equipped with an axis 22 for perpendicular setting to be fitted into a bonding tool attaching hole 10 provided in the bonding arm 8. The block 20 and a bonding head 5 are put on a surface plate 19, and the bonding tool attaching hole 10 is fixed to the axis 22, and thus the bonding arm 8 is set perpendicular. Then, in the state that the bonding tool attaching hole 10 is fitted to the axis 22, by fastening a bonding arm fixing screw 15a, the bonding arm 8 is fixed in the state of being held perpendicular.
申请公布号 JP2002261113(A) 申请公布日期 2002.09.13
申请号 JP20010060542 申请日期 2001.03.05
申请人 SONY CORP 发明人 HONDA KATSUTO
分类号 H01L21/60 主分类号 H01L21/60
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