| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a microlens capable of accurately controlling a gap without depending upon a used material. SOLUTION: The manufacturing method for the microlens contains a pattern forming process for forming patterns of resist-material films 3a on a flattened film 2; and an overcoat-film forming process for forming an overcoat film 4a for controlling the degree of the deformation of the resist-material films 3a in the case of the heating of a subsequent heating process by coating the resist-material films 3a. The manufacturing method further contains an overcoat-film heating process for heating the overcoat film 4a after the overcoat-film forming process, and the heating process for deforming the resist-material films 3a in a projecting-shaped lens form after the overcoat-film heating process. COPYRIGHT: (C)2007,JPO&INPIT
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