| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate where a diamond film having a flat surface that has an abnormally grown particles, a growth hill, and the like, of 10<SP>3</SP>cm<SP>-2</SP>or smaller can be grown since the abnormally grown particle, growth hill, and the like, are normally formed on a homoepitaxially grown diamond film surface by 10<SP>3</SP>cm<SP>-2</SP>or larger and deteriorate not only the flatness of a surface, but also the characteristics of a device manufactured on the substrate. SOLUTION: Disclosed is the diamond thin-film laminate, having a diamond substrate and a defect part growth suppressing diamond thin-film layer formed by doping a substance suppressing growth of a defective part of dislocation, a polishing flaws, and the like, being the cause of the abnormally grown particle, and the growth hill on the surface of a diamond substrate. COPYRIGHT: (C)2009,JPO&INPIT
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