,申请号JP20030150262-传众专利搜索

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发明名称
摘要
申请公布号	JP4403722(B2)	申请公布日期	2010.01.27
申请号	JP20030150262	申请日期	2003.05.28
申请人		发明人
分类号	C30B15/00;H01L21/00;C30B29/06	主分类号	C30B15/00
代理机构		代理人
主权项
地址

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