| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for manufacturing liquid crystal devices, which can form excellent inorganic alignment layers by preventing abnormal discharge from occurring to a sputtering device. Ž<P>SOLUTION: The device for manufacturing the liquid crystal devices includes a film-forming chamber 2 and a sputtering device 3 which forms an inorganic alignment layer on a substrate with an alignment layer material, by means of a spattering method, in the film-forming chamber 2. The sputtering device 3 has a pair of targets 5a and 5b which face each other across a plasma generating area, an aperture part 3a which is provided at the end part, on the upper side (+Z side), of the sputtering device 3 and emits sputter particles 5p from the plasma generating area, and a first adhesion-preventing cover 11A which is provided so that it may extend from the lower end parts of the targets to the lower side (-Z side) and covers the inner wall of the sputtering device 3. An accommodation part 11s, which accommodates particles P which peel off and drop in the film-forming chamber 2 or in the sputtering device 3, is provided on the lower side of the first adhesion-preventing cover 11A. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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