发明名称 UV IRRADIATION DEVICE
摘要 The present invention relates to a UV irradiation device for exposure light with improved light efficiency by removing optical attenuation. More specifically, the UV irradiation device for exposure light comprises: a light-emitting member disposed in a housing having a light-emitting unit formed therein, and emitting light; and first to third reflectors for sequentially reflecting and collecting light of the light-emitting member and emitting the collected light to the light-emitting unit. Light attenuated by being irradiated to a cooling hole disposed in the first reflector is reflected to the first reflector through a second inner reflector, and light attenuated by being irradiated to a side of the light-emitting member is reflected through a first inner reflector, so optical attenuation of the light-emitting member is minimized.
申请公布号 KR101623959(B1) 申请公布日期 2016.05.24
申请号 KR20150135768 申请日期 2015.09.24
申请人 SEIMYUNGVACTRON CO., LTD. 发明人 WON, SANG HEE
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
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