| 摘要 |
The present invention provides a wafer conveying apparatus and a wafer supplying/discharging apparatus. A loader (2) clamped between a magazine (3) and a ring holder (4) comprises two sets of wafer clamps (21a, 21b) to hold a wafer ring (Wn). The two sets of wafer clamps move between the magazine and the ring holder by a rotation driving part (22), and advances on and retreats from the magazine and ring holder by an advance-retreat driving part (23b) independently. The two sets of wafer clamps shift their positions by a movement driving part (24) to be opposed to the ring holder mutually. One wafer clamp (21a) is vacant for extracting the discharging ring (Wo) from the ring holder (4). The other wafer clamp (21b) is for holding the wafer ring received in the ring holder after extracting the discharging ring. The missions of both wafer clamps are exchanged mutually. The topic of the present invention is to reduce the breaking-off time in the supply of devices due to the exchanging operation of wafer ring, and increase the productivity of devices. |
