SEMICONDUCTOR DEVICE, SEMICONDUCTOR SYSTEM AND METHOD OF TESTING SEMICONDUCTOR DEVICE

摘要

A semiconductor device may include a semiconductor substrate doped with a first type impurity; a through electrode inserted in the semiconductor substrate; an active area formed in the semiconductor substrate to surround an upper portion of sidewalls of the through electrode, and doped with a second type impurity; an insulating layer formed between the semiconductor substrate and the through electrode, and between the active area and the through electrode; a drive circuit suitable for applying a first voltage to the through electrode in a test operation; and a test pad connected to the active area electrically in the test operation, to which a voltage is applied from outside.

主权项

1. A semiconductor device comprising:
a semiconductor substrate doped with a first type impurity; a through electrode inserted in the semiconductor substrate; an active area formed in the semiconductor substrate to surround an upper portion of sidewalls of the through electrode, and doped with a second type impurity; an insulating layer formed between the semiconductor substrate and the through electrode, and between the active area and the through electrode; a drive circuit suitable for applying a first voltage to the through electrode in a test operation; and a test pad connected to the active area, to which a voltage is applied during the test operation.