ANALYTICAL METHOD AND ANALYTICAL DEVICE WITH THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a device capable of evaluating an atomic emission profile and cathodoluminescence with excellent resolution capability in a depth direction concurrently with or separately from a surface analytical method using ion sputtering.SOLUTION: An ion-beam induced atomic emission detector is a commercially available super-high vacuum surface analytical device mounted with a spectroscope to disperse an atomic emission spectrum and cathodoluminescence emitted from a specimen and an optical system of an emission detector within a radius of 30 to 50 cm from an irradiation position of a sputter ion and an electron beam.SELECTED DRAWING: Figure 1