发明名称 POSITIVE TYPE PHOTOSENSITIVE RESIN COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a resist resin composition for glass etching having excellent etching accuracy.SOLUTION: A positive type photosensitive resin composition for glass etching comprises an alkali-soluble resin, a photosensitizer, a flat filler with an average particle diameter of 5 μm or less, and a polyfunctional epoxy compound.SELECTED DRAWING: None
申请公布号 JP2016151583(A) 申请公布日期 2016.08.22
申请号 JP20150027299 申请日期 2015.02.16
申请人 NAGASE CHEMTEX CORP 发明人 WAKAMATSU YOSUKE;YAMADA TATSUYA
分类号 G03F7/004;C03C15/00;G03F7/023;G03F7/075;G03F7/40 主分类号 G03F7/004
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