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发明名称
Verfahren und Einrichtung zur Herstellung von Folienblenden,insbesondere Aperturblenden fuer Elektronenmikroskope
摘要
申请公布号
DE1521476(A1)
申请公布日期
1969.07.31
申请号
DE19651521476
申请日期
1965.09.16
申请人
SIEMENS AG
发明人
WERNER KUHL,DIPL.-ING.
分类号
C23C14/00;H01J37/09
主分类号
C23C14/00
代理机构
代理人
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