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发明名称
Verfahren zum AEtzen eines Halbleiterkoerpers
摘要
申请公布号
DE1521822(A1)
申请公布日期
1969.11.06
申请号
DE19661521822
申请日期
1966.01.14
申请人
LICENTIA PATENT-VERWALTUNGS-GMBH
发明人
KOEHL,DR.RER.NAT.GUENTER;HEIDRICH,WERNER
分类号
H01L21/00;H01L21/30;H01L21/306
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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