发明名称 METHOD OF FABRICATING SEMICONDUCTOR PN JUNCTIONS
摘要 A method of forming a pn junction with a Group IIB-VIB compound semiconductor containing Zn is disclosed, the method including preparing an n type semiconductor region either locally or entirely in a Group IIB-VIB compound semiconductor crystal obtained by relying on a crystal growth method in liquid phase using a temperature difference technique, and subjecting this crystal to a thermal annealing in a Zn solution or in a Zn atmosphere to produce an n type region. Crystal growth is conducted while controlling the vapor pressure of the constituent Group IVB element to produce a p type region. A combination of all these steps gives a more stable pn junction.
申请公布号 GB2081013(A) 申请公布日期 1982.02.10
申请号 GB19810018553 申请日期 1981.06.16
申请人 NISHIZAWA JUNI ICHI 发明人
分类号 C30B31/04;H01L21/368;H01L21/383;H01L21/385;H01L21/40;H01L29/227;H01L33/28;H01L33/40 主分类号 C30B31/04
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