发明名称 POSITIONING DEVICE FOR CLEAN ROOM
摘要 PURPOSE:To decrease the number of parts and compact the unit by controlling the telescopic motion of the bellows for positioning in the current operation of the linear DC motor. CONSTITUTION:Bellows 15 are coupled with a pipe 11 to the cylindrical linear DC motor composed of a cylindrical core 1, a magnet 2, an iron core 3, a coil 5, etc. At the tip of the bellows 15 a contactor is installed. Fluid 12 is poured into the pipe 11 and sealed. By means of the current operation of the linear DC motor, the pressure is forced to be produced inside the pipe 11, with which the power and strokes of the bellows 15 are controlled. The bellows 15 perform the telescopic motion, up and down, accurately with the aid of a guide for expansion and contraction provided inside the bellows.
申请公布号 JPS62144555(A) 申请公布日期 1987.06.27
申请号 JP19850284393 申请日期 1985.12.19
申请人 HITACHI METALS LTD 发明人 SHIRASAKI KAZUO
分类号 H02K33/02 主分类号 H02K33/02
代理机构 代理人
主权项
地址