| 摘要 |
PURPOSE:To improve the vibrationproofing effect of a vibration component at a resonant frequency band area in a vibration system, by driving an actuator based on a signal obtained by adding arithmetic calculation including first order integration regarding the time of the output signal of a load detector. CONSTITUTION:It is possible to remarkably reduce a resonant response magnification by driving a piezoelectric actuator in proportion to the signal obtained by performing the first order integration on the output signal of the load detector. Therefore, a voltage signal V corresponding to the optimum increase quantity of the piezoelectric actuator 4 which lowers the resonant response magnification of the vibration system, can be found by a prescribed arithmetic processing, and the voltage signal V is amplified to the impression voltage Va of the piezoelectric actuator 4 by an amplifier 7. When the voltage Va is impressed on the piezoelectric actuator 4, and if a vibromotive force functions at a cycle in the neighborhood of the resonant frequency, the piezoelectric actuator is extended with the phase difference of 180 deg. against the vibromotive force, thereby, the vibration itself of a vibration source is suppressed, and the propagation of the force to a supporting table is suppressed, then, the vibration of the supporting table can be suppressed.
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