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发明名称
VERDAMPFER ZUM AUFBRINGEN VON DUENNSCHICHTEN DURCH VAKUUMAUFDAMPFEN
摘要
申请公布号
ATA901885(A)
申请公布日期
1988.05.15
申请号
AT19850009018
申请日期
1985.04.24
申请人
KIEVSKY POLITEKHNICHESKY INSTITUT IMENI 50-LETIA VELIKOI OKTYABRSKOI SOTSIALISTICHESKOI REVOLJUTSII
发明人
LEVCHENKO GEORGY TIMOFEEVICH;RADZIKOVSKY ALEXANDR NIKOLAEVICH
分类号
H01L21/285;C23C14/24;(IPC1-7):C23C14/24
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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