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发明名称
ISOLATION TRENCHES FOR SEMICONDUCTORS
摘要
申请公布号
GB2210728(A)
申请公布日期
1989.06.14
申请号
GB19870023539
申请日期
1987.10.07
申请人
* STC PLC
发明人
SURESHCHANDRA MISHRILAL * OJHA;PAUL JOHN * ROSSER;PHILIP BERNARD * MOYNAGH
分类号
H01L21/316;H01L21/762
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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