| 发明名称 |
Reflecting device and pattern transfer apparatus using the same. |
| 摘要 |
A reflecting device (2) includes a reflection surface for reflecting light from a predetermined direction; and a driving mechanism for moving the reflection surface without causing a change in a direction of reflection and a position (6,7) of reflection of the input light.
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| 申请公布号 |
EP0387038(A2) |
申请公布日期 |
1990.09.12 |
| 申请号 |
EP19900302441 |
申请日期 |
1990.03.07 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
MOCHIZUKI, NORITAKA, C/O CANON KABUSHIKI KAISHA;EBINUMA, RYUICHI, C/O CANON KABUSHIKI KAISHA |
| 分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
| 代理机构 |
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代理人 |
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