APPARATUS AND PROCESS FOR USING FRESNEL ZONE PLATE ARRAY FOR PROCESSING MATERIALS

摘要

An apparatus and a process of using a Fresnel zone plate array (55) is utilized for processing materials. The Fresnel zone plate array (55) has a plurality of discrete subapertures (A - X) with each subaperture containing image information at a discrete working distance from the plate; each image produced by a subaperture (A - X) of the Fresnel zone plate array (55) typically differs from adjacent images from adjacent subapertures typically in size, shape or gain. A beam is scanned and registered to a discrete selected subaperture on the plate to cause an image from the subaperture to form on a work piece (53') located at the working distance of a scanned subaperture. At each location for processing utilizing a particular selected image, the work piece (53') is positioned, and the laser pulsed with the selected image causing processing of the work piece (53').