| 摘要 |
PURPOSE: To make partial regeneration of the pumping surface for hydrogen, helium, or a lightweight gas similar to them by improving a two-stage cryopump equipped with a condensation/adsorption surface arranged at the second cooling stage. CONSTITUTION: A separate constituent member 12 is installed capable of heating an adsorption surface 13. The constituent member 12 is arranged as changed over between two positions, i.e., a first position (pump driving position) where it makes thermal contacting with a second cooling stage 9 of a refrigerator 4 and a second position (refrigerator driving position) where it is insulated thermally from the second cooling stage of the refrigerator 4.
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