ROTATION PROCESSING APPARATUS,申请号JP19910058600-传众专利搜索

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发明名称	ROTATION PROCESSING APPARATUS
摘要
申请公布号	JPH04293571(A)	申请公布日期	1992.10.19
申请号	JP19910058600	申请日期	1991.03.22
申请人	TOKYO ELECTRON LTD;TOKYO ELECTRON KYUSHU KK	发明人	IWAZU HARUO
分类号	B05C11/08;G03F7/16;H01L21/027	主分类号	B05C11/08
代理机构		代理人
主权项
地址

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