| 摘要 |
PURPOSE:To inspect a surface to be inspected for flaws over a wide extent with a fiber bundle composed of a small number of optical fibers and, at the same time, to reduce the size and weight of a light receiving system. CONSTITUTION:This surface flaw inspecting device is constituted of a light transmitting system composed of a condenser lens 3 which scans a surface 6 to be inspected with laser light 2 converted to a narrow beam in one direction and vibratory mirror 5, light receiving system composed of a light receiving lens 5 which receives scattered light 8 reflected by the surface 6 and a fiber bundle 11, and photoelectric converter 12 and signal processor 13 which analyze the presence/absence of a surface flaw by processing the light receiving signal of the light receiving system. The fiber bundle 11 is set to a position 10' which is deviated from the image forming position 10 of the lens 9. |
