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发明名称
SURFACE FORM MEASURING DEVICE
摘要
申请公布号
JPH05332741(A)
申请公布日期
1993.12.14
申请号
JP19920138737
申请日期
1992.05.29
申请人
TOSHIBA CORP
发明人
SAMEDA YOSHITOMI
分类号
G01B11/24;G01B11/245;G01J1/00;(IPC1-7):G01B11/24
主分类号
G01B11/24
代理机构
代理人
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