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发明名称
Verfahren zur Herstellung von Mikrostrukturkörpern
摘要
申请公布号
DE4229244(A1)
申请公布日期
1994.03.03
申请号
DE19924229244
申请日期
1992.09.02
申请人
BASF AG, 67063 LUDWIGSHAFEN, DE
发明人
HOESSEL, PETER, DR., 67105 SCHIFFERSTADT, DE;STEPHAN, OSKAR, 68766 HOCKENHEIM, DE;HOFFMANN, GERHARD, DR., 67166 OTTERSTADT, DE;LANGEN, JUERGEN, DR., 53229 BONN, DE
分类号
B29C35/08;B29C43/18;B29C59/16;B29C70/78;B81B1/00;B81C1/00;G03F7/16;G03F7/20;H01L21/027;(IPC1-7):G03F7/16;G03F7/004
主分类号
B29C35/08
代理机构
代理人
主权项
地址
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